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溅射不起辉的常见原因Sputtering is not a common cause of brightness

磁控溅射金属靶时,无法起辉的原因有很多,常见主要原原因有:

When magnetron sputtering a metal target, there are many reasons for the failure to glow, the common main reasons are:

1. 靶材安装准确否?

Is the installation of target material accurate?

2. 靶材表面是否干净------------金属靶表面氧化或有不清洁物质,打磨清理干净后即可

Whether the surface of the target material is clean or not -- the surface of the metal target is oxidized or there may be unclean substances, which can be polished and cleaned

3. 起辉电源是否正常------------检查靶电源

Whether the starter power supply is normal -- check the target power supply

4. 靶与地线之间短路Short circuit between target and ground

----------关掉机器,把设备的溅射靶卸下来,靶附近的零件仔细清洗一下;

turn off the machine, unload the sputtering target of the equipment, and carefully clean the parts near the target;

----------压靶盖旋的过紧,没有和靶材之间留下适当的距离,调整距离即可。

pressing the cover of the target too tight, there is no appropriate distance between the target material, the distance can be adjusted.

5. 永磁靶表面场强是否下降太多?

Does the surface strength of the permanent magnet target drop too much?

---------如果下降太多,需要更换磁钢。

if it drops too much, the magnetic steel needs to be replaced.

6. 起辉溅射真空度与前次的差别?

What is the difference between the sputtering vacuum and the previous one?

---------更换不同的靶材,起辉压强不尽相同。

different target materials are replaced, the luminous pressure is not the same.

换靶材后需要重新调功率匹配器的,只有功率匹配调好了才能正常起辉

If the power matcher needs to be adjusted again after the target material is changed, the normal brightening can only be achieved if the power matching is adjusted well


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